@inproceedings{BoegeSchaeferShanjiaetal.1994,
  author    = {P. Boege and H. Sch{\"a}fer and Xu Shanjia and Wu Xinzhang and S. Einfeldt and Charles R. Becker and D. Hommel and R. Geick},
  title     = {Improved conductivity-measurement of semiconductor epitaxial layers by means of the contactless microwave method},
  year      = {1994},
}