TY  - JOUR
A1  - Müller, Dominik
A1  - Graetz, Jonas
A1  - Balles, Andreas
A1  - Stier, Simon
A1  - Hanke, Randolf
A1  - Fella, Christian
T1  - Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research
T2  - Crystals
N2  - In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, aging in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of composites. Thus, the laboratory system provides the unique possibility to image non-destructively structures in the range of 170–190 nanometers, even for high-density materials.
KW  - nano CT
KW  - laboratory
KW  - X-ray
KW  - 3D reconstruction
KW  - instrumentation
KW  - integrated circuits
KW  - nondestructive testing
KW  - 3D X-ray microscopy
Y1  - 2021
UR  - https://opus.bibliothek.uni-wuerzburg.de/frontdoor/index/index/docId/24104
UR  - https://nbn-resolving.org/urn:nbn:de:bvb:20-opus-241048
SN  - 2073-4352
VL  - 11
IS  - 6
ER  -