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Graphene-based single-electron and hybrid devices, their lithography, and their transport properties
(2016)
This work explores three different aspects of graphene, a single-layer of carbon atoms arranged in a hexagonal lattice, with regards to its usage in future electronic devices; for instance in the context of quantum information processing. For a long time graphene was believed to be thermodynamically unstable. The discovery of this strictly two-dimensional material completed the family of carbon based structures, which had already been subject of intensive research with focus on zero-dimensional fullerenes and one-dimensional carbon nanotubes. Within only a few years of its discovery, the field of graphene related research has grown into one of today’s most diverse and prolific areas in condensed matter physics, highlighted by the award of the 2010 Nobel Prize in Physics to A.K. Geim and K. Noveselov for “their groundbreaking experiments regarding the two-dimensional material graphene”.
From the point of view of an experimental physicist interested in the electronic properties of a material system, the most intriguing characteristic of graphene is found in the Dirac-like nature of its charge carriers, a peculiar fact that distinguishes graphene from all other known standard semiconductors. The dynamics of charge carriers close to zero energy are described by a linear energy dispersion relation, as opposed to a parabolic one, which can be understood as a result of the underlying lattice symmetry causing them to behave like massless relativistic particles. This fundamentally different behavior can be expected to lead to the observation of completely new phenomena or the occurrence of deviations in well-known effects.
Following a brief introduction of the material system in chapter 2, we present our work studying the effect of induced superconductivity in mesoscopic graphene Josephson junctions by proximity to superconducting contacts in chapter 3. We explore the use of Nb as the superconducting material driven by the lack of high critical temperature and high critical magnetic field superconductor technology in graphene devices at that time. Characterization of sputter-deposited Nb films yield a critical transition temperature of \(T_{C}\sim 8{\rm \,mK}\). A prerequisite for successful device operation is a high interface quality between graphene and the superconductor. In this context we identify the use of an Ti as interfacial layer and incorporate its use by default in our lithography process. Overall we are able to increase the interface transparency to values as high as \(85\%\). With the prospect of interesting effects in the ballistic regime we try to enhance the electronic quality of our Josephson junction devices by substrate engineering, yet with limited success. We achieve moderate charge carrier mobilities of up to \(7000{\rm \,cm^2/Vs}\) on a graphene/Boron-nitride heterostructure (fabrication details are covered in chapter 5) putting the junction in the diffusive regime (\(L_{device}<L_{\rm{mfp}}\)). We speculate that either inhomogeneities in the graphene channel or lithography residues are responsible for this observation.
Furthermore we study the Josephson effect and Andreev reflection related physics in this device by low-temperature transport measurements. The junction carries a bipolar supercurrent which remains finite at the charge neutrality point. The genuine Josephson character is confirmed by the modulation of the supercurrent as a function of an out-of-plane magnetic field resembling that of a Fraunhofer-like pattern. This is further supported by the response of the junction to microwave radiation in the form of Shaprio steps. Surprisingly we find a strongly reduced superconducting energy gap of approximately \(\Delta = 400{\rm \,\mu eV}\) by quantitatively analyzing data of multiple Andreev reflections. We show this result to be consistent by careful analysis of the device parameters and comparison of these to a theoretical model. More experiments will be needed to determine the origin of this reduction and if the presence of the Ti interfacial layer plays an important role in that.
With regards to possible usability of superconducting contacts in more complex hybrid structures we can conclude that our work establishes the necessary preconditions while still leaving room for improvements; especially in terms of device quality.
In the second part of this work we are primarily interested in electrical transport properties of graphene nanodevices and their application in graphene-superconductor hybrid structures. The fact that graphene is mechanically stable down to a few tens of nanometers in width while exhibiting a finite conductance makes it an appealing choice as host for single-electron devices, also known as quantum dots. Our work on this topic is covered in chapter 4 where we first develop a high-resolution lithography process for the fabrication of single electron devices with critical feature sizes of roughly \(50{\rm \,nm}\). To this end we use a resist etch mask in combination with a reactive-ion etch process for device patterning. Carrier confinement in graphene is known to be hindered by the Klein tunneling phenomenon, a challenge that can be overcome by using all-graphene nano-constrictions to decouple the source and drain contacts from the central island.
The traditionally used constriction design is comprised of long and narrow connections. We argue that a design with very short and narrow constrictions could be beneficial for the quantum dot performance as the length merely affects the overall conductance and requires extended side-gates to control their transmission. We confirm the functionality of two different devices in low-temperature measurements, which differ in the size of their central island with \(d=250{\rm \,nm}\) for device no. 1 and \(d=400{\rm \,nm}\) for device no. 2. Coulomb blockade measurements conducted at \(20{\rm \,mK}\) on both devices reveal clear sequences of Coulomb peaks with amplitudes of up to \(0.8\rm{\,e}^2/\rm{h}\), a value significantly larger than what is commonly reported for similar devices. We interpret this as an indication of rather homogeneous constrictions, resulting from the modified design. Coulomb diamond measurements display the behavior expected for a lithographically designed single quantum dot revealing no features related to the presence of an additional dot. Using the stability diagram we determine the addition energies of the two dots and find them to be in good agreement with values reported in the literature for devices of similar size. Using the normalized Coulomb peak spacing as a figure of merit for the device quality we find that device no. 1 quantitatively compares well with a similar device fabricated on a superior hexagonal boron-nitride substrate. This result underlines the importance of non-substrate related extrinsic disorder sources and emphasizes the cleanliness of our lithography process.
Superconductor-graphene quantum dot hybrid structures employing Nb and Al electrodes were successfully fabricated from a lithography point of view, yet no evidence of any superconducting related effect was found in transport measurements. We assign the missing observation to interface issues that require careful analysis and likely a revision of the fabrication process.
A property equally important in graphene Josephson Junctions and quantum dots is the electronic quality of the device, as has been addressed in the previous paragraphs. It turns out that the \(\rm{SiO}_{2}\;\) substrate and lithography residues constitute the two major sources of disorder in graphene. In chapter 5 we present an approach based on the original work of Dean et al. who utilize hexagonal-Boron nitride as a replacement substrate for \(\rm{SiO}_{2}\). This idea was then extended by Wang et al. who also used this material as a shield to protect the graphene surface from contaminations during the lithography process. These structures are commonly referred to as van der Waals heterostructures and are assembled by stacking individual crystals on top of each other.
For this purpose we build a mechanical transfer system based on an optical microscope equipped with an additional micro-manipulator stage allowing precise alignment of two micrometer sized crystals with high precision. We demonstrate the functionality of this setup on the basis of successfully fabricated heterostructures. Furthermore a variation on the traditional method for single graphene/boron nitride structures is presented. Based on a reversed stacking order this method yields large areas of homogeneous graphene, however it comes with the drawback of limited yields. A common type of problem accompanying the fabrication of encapsulated graphene structures is the formation of contamination spots (also referred to as bubbles in the literature) at the interfaces between BN and graphene. We experience similar issues which we are unable to prevent and thus pose a limit to the maximum available device size. In the next step we develop a full lithography paradigm including high-resolution device patterning by electron beam lithography combined with reactive ion etching and two different ways to establish electrical contact to the encapsulated graphene flake. In this context we explore the use of three different types of etch masks and find a double layer of PMMA/HSQ best suited for our purposes. Our low power plasma etch process utilizes a combination of \(\rm{O}_{2}\;\) and \(\rm{CHF}_{3}\;\) and is optimized to show reproducible etch results.
A widely used method for electrical contacts relies on one-dimensional edge contacts whose functionality crucially depends on the use of Cr as the interface layer. For compatibility reasons with superconducting materials, e.g. Nb, we develop a self-aligned contact process that instead of only Cr is also compatible with Ti. We achieve this by modifying the plasma etch parameters such that the etch process exhibits extremely low graphene etch rates while keeping a high etch rate for h-BN. This allows clearing of a narrow stripe of graphene at the edge of the structure by using a thick PMMA layer as etch mask as replacement of the PMMA/HSQ combination. The purpose of this PMMA mask is two-fold since it also serves as lift-off mask during metalization.
The quality of the edge contacts fabricated with either method is excellent as determined from transport measurements at room and cryogenic temperatures. With typical contact resistances of a few hundred \({\rm \,}\Omega\mu{\rm m}\) and a record low of \(100{\rm \,}\Omega\mu{\rm m}\) the contacts can be considered to be state-of-the-art. The positive effect of encapsulation on the electronic quality is confirmed on a device exhibiting charge carrier mobilities exceeding \(10^5{\rm \,cm^2/Vs}\), one magnitude larger than what is commonly achieved on \(\rm{SiO}_{2}\).
The investigation of induced superconductivity in graphene Josephson Junctions, quantum dots, and high mobility heterostructures underlines the versatility of this material system, while covering only a tiny fraction of its prospects. Combination of the acquired knowledge regarding the physical effects and the developed lithography processes lay the foundation towards the fabrication and study of novel graphene hybrid devices.
Recently a new state of matter was discovered in which the bulk insulating state in a material is accompanied by conducting surface or edge states. This new state of matter can be distinguished from a conventional insulator phase by the topological properties of its band structure which led to the name "topological insulators". Experimentally, topological insulator states are mostly found in systems characterized by a band inversion compared to conventional systems. In most topological insulator systems, this is caused by a combination of energetically close bands and spin orbit coupling. Such properties are found in systems with heavy elements like Hg and Bi. And indeed, the first experimental discovery of a topological insulator succeeded in HgTe quantum wells and later also in BiSb bulk systems.
Topological insulators are of large interest due to their unique properties: In 2-dimensional topological insulators one dimensional edge states form without the need of an external magnetic field (in contrast to the quantum Hall effect). These edge states feature a linear band dispersion, a so called Dirac dispersion. The quantum spin Hall states are helical edge states, which means they consist of counterpropagating oppositely spin polarized edge channels. They are therefore of great potential for spintronic applications as well as building blocks for new more exotic states like Majorana Fermions. 3-dimensional topological insulators feature 2-dimensional surface states with only one Dirac band (also called Dirac cone) on each surface and an interesting spin texture where spin and momentum are locked perpendicular to each other in the surface plane. This unique surface band structure is predicted to be able to host several exotic states like e.g. Majorana Fermions (in combination with superconductors) and magnetic monopole like excitations.
This PhD thesis will summarize the discovery of topological insulators and highlights the developments on their experimental observations. The work focuses on HgTe which is up to now the only topological insulator material where the expected properties are unambiguously demonstrated in transport experiments. In HgTe, the topological insulator properties arise from the inversion of the Gamma_6 and Gamma_8 bands. The band inversion in HgTe is due to a combination of a high spin orbit splitting in Te and large energy corrections (due to the mass-velocity term) to the energy levels in Hg. Bulk HgTe, however, is a semimetal, which means for the conversion into a topological insulator a band gap has to be opened. In two dimensions (HgTe quantum well structures) this is achieved via quantum confinement, which opens a band gap between the quantum well subbands. In three dimensions, strain is used to lift the degeneracy of the semimetallic Gamma_8 bands opening up a band gap.
The thesis is structured as follows:
- The first chapter of this thesis will give a brief overview on discoveries in the field of topological insulators. It focuses on works relevant to experimental results presented in the following chapters. This includes a short outline of the early predictions and a summary of important results concerning 2-dimensional topological insulators while the final section discusses observations concerning 3-dimensional topological insulators.
- The discovery of the quantum spin Hall effect in HgTe marked the first experimental observation of a topological insulator. Chapter 2 will focus on HgTe quantum wells and the quantum spin Hall effect.
Above a critical thickness, HgTe quantum wells are predicted to host the quantum spin Hall state, the signature of a 2-dimensional topological insulator. HgTe quantum wells exhibiting low carrier concentrations and at the same time high carrier mobilities are required to be able to measure the quantum spin Hall effect. The growth of such high quality HgTe quantum wells was one of the major goals for this work. Continuous optimization of the substrate preparation and growth conditions resulted in controlled carrier densities down to a few 10^10 cm^-2. At the same time, carrier mobilities exceeding 1 x 10^6 cm^2/Vs have been achieved, which provides mean free paths of several micrometers in the material. Thus the first experimental evidence for the existence of the quantum spin Hall edge states succeeded in transport experiments on microstructures: When the Fermi energy was located in the bulk band gap a residual quantized resistance of 2e^2/h was found. Further experiments focused on investigating the nature of transport in this regime. By non-local measurements the edge state character could be established. The measured non-local resistances corresponded well with predictions from the Landauer-Büttiker theory applied to transport in helical edge channels.
In a final set of experiments the spin polarization of the edge channels was investigated. Here, we could make use of the advantage that HgTe quantum well structures exhibit a large Rashba spin orbit splitting. In systems with a large Rashba spin orbit splitting a spin accumulation is expected to occur at the edge of the sample perpendicular to a current flow. This so-called spin Hall effect was then used as a spin injector and detector. Using split gate devices it was possible to bring spin Hall and quantum spin Hall state into direct contact, which enabled an all electrical detection of the spin polarization of the quantum spin Hall edge channels.
- HgTe as a 3-dimensional topological insulator will be presented in chapter 3. Straining the HgTe layer enables the observation of topological insulator behavior. It was found that strain can be easily implemented during growth by using CdTe substrates. CdTe has a slightly larger lattice constant than HgTe and therefore leads to tensile strain in the HgTe layer as long as the growth is pseudomorphic. Magnetotransport studies showed the emergence of quantum Hall transport with characteristic signatures of a Dirac type bandstructure. Thus, this result marks the first observation of the quantum Hall effect in the surface states of a 3-dimensional topological insulator.
Transport experiments on samples fitted with a top gate enabled the identification of contributions from individual surfaces. Furthermore, the surface state quantum Hall effect was found to be surprisingly stable, perturbations due to additional bulk transport could not be found, even at high carrier densities of the system.
- Chapters 4 - 6 serve as in depth overviews of selected works: Chapter 4 presents a detailed overview on the all electrical detection of the spin Hall effect in HgTe quantum wells. The detection of the spin polarization of the quantum spin Hall effect is shown in chapter 5 and chapter 6 gives a detailed overview on the quantum Hall effect originating from the topological surface state in strained bulk HgTe.
The investigations discussed in this thesis pioneered the experimental work on the transport properties of topological insulator systems. The understanding of the fundamental properties of topological insulators enables new experiments in which e.g. the inclusion of magnetic dopants or the interplay between topological insulator and superconductors can be investigated in detail.