@article{KotzRischArnoldetal.2019, author = {Frederik Kotz and Patrick Risch and Karl Arnold and Semih Sevim and Josep Puigmart{\´i}-Luis and Alexander Quick and Michael Thiel and Andrei Hrynevich and Paul D. Dalton and Dorothea Helmer and Bastian E. Rapp}, title = {Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass}, journal = {Nature Communications}, volume = {10}, doi = {10.1038/s41467-019-09497-z}, year = {2019}, }