The synthesis and the thermal behaviour of the (methylphenylsilyl)methyl carbonates \(CH_3(C_6H_5)Si(H)CH_2OC(O)X (6: X = OCH_3; 7: X = Cl; 8: X = N(CH_3)_2)\) is described. 8 rearranges in toluene solution at 100 °C quantitatively to give the carbam oyloxysilane \(C_6H_5(CH_3)_2SiOC(O)N(CH_3)_2\) (11), whereas neat 6 and 7 at 135 °C undergo quantitative formation of \(C_6H_5(CH_3)_2SiOCH_3\) (12) and \(C_6H_5(CH_3)_2SiCl\) (13), respectively. The formation of 12 and 13 is explained by a rearrangement reaction (by analogy to the rearrangement of 8), follow ed by a decarboxylation. The thermally induced transformations 6 →12, 7 →13, and 8 →11 were found to be first-order reactions with half-lifes of ~2.6 h (135 °C, neat), ~4.5 h (135 °C, neat), and ~3.7 h (100 °C, in toluene), respectively.