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In the present thesis the MBE growth and sample characterization of HgTe structures is investigated
and discussed. Due to the first experimental discovery of the quantum Spin Hall effect
(QSHE) in HgTe quantum wells, this material system attains a huge interest in the spintronics
society. Because of the long history of growing Hg-based heterostructures here at the Experimentelle
Physik III in Würzburg, there are very good requirements to analyze this material
system more precisely and in new directions. Since in former days only doped HgTe quantum
wells were grown, this thesis deals with the MBE growth in the (001) direction of undoped
HgTe quantum wells, surface located quantum wells and three dimensional bulk layers. All
Hg-based layers were grown on CdTe substrates which generate strain in the layer stack and
provide therefore new physical effects. In the same time, the (001) CdTe growth was investigated
on n-doped (001) GaAs:Si because the Japanese supplier of CdTe substrates had a
supply bottleneck due to the Tohoku earthquake and its aftermath in 2011.
After a short introduction of the material system, the experimental techniques were demonstrated
and explained explicitly. After that, the experimental part of this thesis is displayed.
So, the investigation of the (001) CdTe growth on (001) GaAs:Si is discussed in chapter 4.
Firstly, the surface preparation of GaAs:Si by oxide desorption is explored and analyzed.
Here, rapid thermal desorption of the GaAs oxide with following cool down in Zn atmosphere
provides the best results for the CdTe due to small holes at the surface, while e.g. an atomic
flat GaAs buffer deteriorates the CdTe growth quality. The following ZnTe layer supplies the
(001) growth direction of the CdTe and exhibits best end results of the CdTe for 30 seconds
growth time at a flux ratio of Zn/Te ~ 1/1.2. Without this ZnTe layer, CdTe will grow in the
(111) direction. However, the main investigation is here the optimization of the MBE growth
of CdTe. The substrate temperature, Cd/Te flux ratio and the growth time has to be adjusted
systematically. Therefore, a complex growth process is developed and established. This optimized
CdTe growth process results in a RMS roughness of around 2.5 nm and a FWHM value
of the HRXRD w-scan of 150 arcsec. Compared to the literature, there is no lower FWHM
value traceable for this growth direction. Furthermore, etch pit density measurements show
that the surface crystallinity is matchable with the commercial CdTe substrates (around 1x10^4
cm^(-2)). However, this whole process is not completely perfect and offers still room for improvements.
The growth of undoped HgTe quantum wells was also a new direction in research in contrast
to the previous n-doped grown HgTe quantum wells. Here in chapter 5, the goal of very low
carrier densities was achieved and therefore it is now possible to do transport experiments in
the n - and p - region by tuning the gate voltage. To achieve this high sample quality, very precise
growth of symmetric HgTe QWs and their HRXRD characterization is examined. Here,
the quantum well thickness can now determined accurate to under 0.3 nm. Furthermore, the transport analysis of different quantum well thicknesses shows that the carrier density and
mobility increase with rising HgTe layer thickness. However, it is found out that the band
gap of the HgTe QW closes indirectly at a thickness of 11.6 nm. This is caused by the tensile
strained growth on CdTe substrates. Moreover, surface quantum wells are studied. These
quantum wells exhibit no or a very thin HgCdTe cap. Though, oxidization and contamination
of the surface reduces here the carrier mobility immensely and a HgCdTe layer of around 5 nm
provides the pleasing results for transport experiments with superconductors connected to the
topological insulator [119]. A completely new achievement is the realization of MBE growth
of HgTe quantum wells on CdTe/GaAs:Si substrates. This is attended by the optimization of
the CdTe growth on GaAs:Si. It exposes that HgTe quantum wells grown in-situ on optimized
CdTe/GaAs:Si show very nice transport data with clear Hall plateaus, SdH oscillations, low
carrier densities and carrier mobilities up to 500 000 cm^2/Vs. Furthermore, a new oxide etching
process is developed and analyzed which should serve as an alternative to the standard
HCl process which generates volcano defects at some time. However, during the testing time
the result does not differ in Nomarski, HRXRD, AFM and transport measurements. Here,
long-time tests or etching and mounting in nitrogen atmosphere may provide new elaborate
results.
The main focus of this thesis is on the MBE growth and standard characterization of HgTe bulk
layers and is discussed in chapter 6. Due to the tensile strained growth on lattice mismatched
CdTe, HgTe bulk opens up a band gap of around 22 meV at the G-point and exhibits therefore
its topological surface states. The analysis of surface condition, roughness, crystalline quality,
carrier density and mobility via Nomarski, AFM, XPS, HRXRD and transport measurements
is therefore included in this work. Layer thickness dependence of carrier density and mobility
is identified for bulk layer grown directly on CdTe substrates. So, there is no clear correlation
visible between HgTe layer thickness and carrier density or mobility. So, the carrier density is
almost constant around 1x10^11 cm^(-2) at 0 V gate voltage. The carrier mobility of these bulk
samples however scatters between 5 000 and 60 000 cm^2/Vs almost randomly. Further experiments
should be made for a clearer understanding and therefore the avoidance of unusable
bad samples.But, other topological insulator materials show much higher carrier densities and
lower mobility values. For example, Bi2Se3 exhibits just density values around 1019 cm^(-2)
and mobility values clearly below 5000 cm2/Vs. The carrier density however depends much
on lithography and surface treatment after growth. Furthermore, the relaxation behavior and
critical thickness of HgTe grown on CdTe is determined and is in very good agreement with
theoretical prediction (d_c = 155 nm). The embedding of the HgTe bulk layer between HgCdTe
layers created a further huge improvement. Similar to the quantum well structures the carrier
mobility increases immensely while the carrier density levels at around 1x10^11 cm^(-2) at 0
V gate voltage as well. Additionally, the relaxation behavior and critical thickness of these
barrier layers has to be determined. HgCdTe grown on commercial CdTe shows a behavior as
predicted except the critical thickness which is slightly higher than expected (d_c = 850 nm).
Otherwise, the relaxation of HgCdTe grown on CdTe/GaAs:Si occurs in two parts. The layer
is fully strained up to 250 nm. Between 250 nm and 725 nm the HgCdTe film starts to relax
randomly up to 10 %. The relaxation behavior for thicknesses larger than 725 nm occurs than
linearly to the inverse layer thickness. A explanation is given due to rough interface conditions
and crystalline defects of the CdTe/GaAs:Si compared to the commercial CdTe substrate. HRXRD and AFM data support this statement. Another point is that the HgCdTe barriers protect the active HgTe layer and because of the high carrier mobilities the Hall measurements provide new transport data which have to be interpreted more in detail in the future. In addition, HgTe bulk samples show very interesting transport data by gating the sample from the top and the back. It is now possible to manipulate the carrier densities of the top and bottom surface states almost separately. The back gate consisting of the n-doped GaAs substrate and the thick insulating CdTe buffer can tune the carrier density for Delta(n) ~ 3x10^11 cm^(-2). This is sufficient to tune the Fermi energy from the p-type into the n-type region [138].
In this thesis it is shown that strained HgTe bulk layers exhibit superior transport data by embedding between HgCdTe barrier layers. The n-doped GaAs can here serve as a back gate.
Furthermore, MBE growth of high crystalline, undoped HgTe quantum wells shows also new
and extended transport output. Finally, it is notable that due to the investigated CdTe growth
on GaAs the Hg-based heterostructure MBE growth is partially independent from commercial
suppliers.
Topological insulators belong to a new quantum state of matter that is currently one of
the most recognized research fields in condensed matter physics. Strained bulk HgTe
and HgTe/HgCdTe quantum well structures are currently one of few topological insulator
material systems suitable to be studied in transport experiments. In addition
HgTe quantum wells provide excellent requirements for the conduction of spintronic
experiments. A fundamental requirement for most experiments, however, is to reliably
pattern these heterostructures into advanced nano-devices. Nano-lithography on this
material system proves to be challenging because of inherent temperature limitations,
its high reactivity with various metals and due to its properties as a topological insulator.
The current work gives an insight into why many established semiconductor
lithography processes cannot be easily transferred to HgTe while providing alternative
solutions. The presented developments include novel ohmic contacts, the prevention
of metal sidewalls and redeposition fences in combination with low temperature
(80 °C) lithography and an adapted hardmask lithography process utilizing a sacrificial
layer. In addition we demonstrate high resolution low energy (2.5 kV) electron beam
lithography and present an alternative airbridge gating technique. The feasibility of
nano-structures on HgTe quantum wells is exemplarily verified in two separate transport
experiments. We are first to realize physically etched quantum point contacts
in HgTe/HgCdTe high mobility 2DEGs and to prove their controllability via external
top-gate electrodes. So far quantum point contacts have not been reported in TI
materials. However, these constrictions are part of many proposals to probe the nature
of the helical quantum spin Hall edge channels and are suggested as injector and
detector devices for spin polarized currents. To confirm their functionality we performed
four-terminal measurements of the point contact conductance as a function of
external gate voltage. Our measurements clearly exhibit quantized conductance steps
in 2e2/h, which is a fundamental characteristic of quantum point contacts. Furthermore
we conducted measurements on the formation and control of collimated electron beams, a key feature to realize an all electrical spin-optic device. In a second study
several of the newly developed lithography techniques were implemented to produce
arrays of nano-wires on inverted and non-inverted HgTe quantum well samples. These
devices were used in order to probe and compare the weak antilocalization (WAL) in
these structures as a function of magnetic field and temperature. Our measurements
reveal that the WAL is almost an order of magnitude larger in inverted samples. This
observation is attributed to the Dirac-like dispersion of the energy bands in HgTe quantum
wells. The described lithography has already been successfully implemented and
adapted in several published studies. All processes have been optimized to guarantee
a minimum effect on the heterostructure’s properties and the sample surface, which is
especially important for probing the topological surface states of strained HgTe bulk
layers. Our developments therefore serve as a base for continuous progress to further
establish HgTe as a topological insulator and give access to new experiments.
Exploring the transport properties of the three-dimensional topological insulator material HgTe
(2015)
In the present thesis the transport properties of strained bulk HgTe devices are investigated. Strained HgTe forms a 3D TI and is of special interest for studying topological surface states, since it can be grown by MBE in high crystal quality. The low defect density leads to considerable mobility values, well above the mobilities of other TI materials. However, strained HgTe has a small band gap of ca. 20 meV. With respect to possible applications the question is important, under which conditions the surface transport occurs. To answer this question, the HgTe devices are investigated at dilution refrigerator temperatures (T<100 mK) in high magnetic fields of different orientation. The influence of top and back gate electrodes as well as surface protecting layers is discussed.
On the basis of an analysis of the quantum Hall behaviour it is shown that transport is dominated by the topological surface states in a surprisingly large parameter range. A dependence on the applied top gate voltage is presented for the topological surface states. It enables the first demonstration of an odd integer QHE sequence from the surfaces perpendicular to the magnetic field. Furthermore, the p-type QHE from the surface states is observed for the first time in any 3D TI. This is achieved in samples of high surface quality. It is concluded from the gate response that the screening behaviour in 3D TI devices is non-trivial. The transport data are qualitatively analysed by means of intuitive theoretical models.
The combination of a topological insulator (TI) and a superconductor (S), which together
form a TI/S interface, is expected to influence the possible surface states in the
TI. It is of special interest, if the theoretical prediction of zero energy Majorana states
in this system is verifiable. This thesis presents the experimental realization of such
an interface between the TI strained bulk HgTe and the S Nb and studies if the afore
mentioned expectations are met.
As these types of interfaces were produced for the first time the initial step was
to develop a new lithographic process. Optimization of the S deposition technique as
well as the application of cleaning processes allowed for reproducible fabrication of
structures. In parallel the measurement setup was upgraded to be able to execute the
sensitive measurements at low energy. Furthermore several filters have been implemented
into the system to reduce high frequency noise and the magnetic field control
unit was additionally replaced to achieve the needed resolution in the μT range.
Two kinds of basic geometries have been studied: Josephson junctions (JJs) and
superconducting quantum interference devices (SQUIDs). A JJ consists of two Nb contacts
with a small separation on a HgTe layer. These S/TI/S junctions are one of the
most basic structures possible and are studied via transport measurements. The transport
through this geometry is strongly influenced by the behavior at the two S/TI
interfaces. In voltage dependent differential resistance measurements it was possible
to detect multiple Andreev reflections in the JJ, indicating that electrons and holes are
able to traverse the HgTe gap between both interfaces multiple times while keeping
phase coherence. Additionally using BTK theory it was possible to extract the interface
transparency of several junctions. This allowed iterative optimization for the highest
transparency via lithographic improvements at these interfaces. The increased transparency
and thus the increased coupling of the Nb’s superconductivity to the HgTe
results in a deeper penetration of the induced superconductivity into the HgTe. Due
to this strong coupling it was possible to enter the regime, where a supercurrent is
carried through the complete HgTe layer. For the first time the passing of an induced
supercurrent through strained bulk HgTe was achieved and thus opened the area for
detailed studies. The magnetic dependence of the supercurrent in the JJ was recorded,
which is also known as a Fraunhofer pattern. The periodicity of this pattern in magnetic
field compared to the JJ geometry allowed to conclude how the junction depends
on the phase difference between both superconducting contacts. Theoretical calculations
predicted a phase periodicity of 4p instead of 2p, if a TI is used as weak link
material between the contacts, due to the presence of Majorana modes. It could clearly
be shown that despite the usage of a TI the phase still was 2p periodic. By varying
further influencing factors, like number of modes and phase coherence length in the
junction, it might still be possible to reach the 4p regime with bound Majorana states
in the future. A good candidate for further experiments was found in capped HgTe
samples, but here the fabrication process still has to be developed to the same quality
as for the uncapped HgTe samples.
The second type of geometry studied in this thesis was a DC-SQUID, which consists
of two parallel JJs and can also be described as an interference device between two JJs.
The DC-SQUID devices were produced in two configurations: The symmetric SQUID,
where both JJs were identical, and the asymmetric SQUID, where one JJ was not linear,
but instead has a 90° bent. These configurations allow to test, if the predicted
uniformity of the superconducting band gap for induced superconductivity in a TI
is valid. While the phase of the symmetric SQUID is not influenced by the shape of
the band gap, the asymmetric SQUID would be in phase with the symmetric SQUID
in case of an uniform band gap and out of phase if p- or d-wave superconductivity
is dominating the transport, due to the 90° junction. As both devices are measured
one after another, the problem of drift in the coil used to create the magnetic field has
to be overcome in order to decide if the oscillations of both types of SQUIDs are in
phase. With an oscillation period of 0.5 mT and a drift rate in the range of 5.5 μT/h
the measurements on both configurations have to be conducted in a few hours. Only
then the total shift is small enough to compare them with each other. For this to be
possible a novel measurement system based on a real time micro controller was programmed,
which allows a much faster extraction of the critical current of a device. The
measurement times were reduced from days to hours, circumventing the drift problems
and enabling the wanted comparison. After the final system optimizations it has
been shown that the comparison should now be possible. Initial measurements with
the old system hinted that both types of SQUIDs are in phase and thus the expected
uniform band gap is more likely. With all needed optimizations in place it is now up
to the successors of this project to conclusively prove this last point.
This thesis has proven that it is possible to induce superconductivity in strained
bulk HgTe. It has thus realized the most basic sample geometry proposed by Fu and
Kane in 2008 for the appearance of Majorana bound states. Based on this work it is
now possible to further explore induced superconductivity in strained bulk HgTe to
finally reach a regime, where the Majorana states are both stable and detectable.