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Let (ϕ\(_t\))\(_{t≥0}\) be a semigroup of holomorphic functions in the unit disk \(\mathbb {D}\) and K a compact subset of \(\mathbb {D}\). We investigate the conditions under which the backward orbit of K under the semigroup exists. Subsequently, the geometric characteristics, as well as, potential theoretic quantities for the backward orbit of K are examined. More specifically, results are obtained concerning the asymptotic behavior of its hyperbolic area and diameter, the harmonic measure and the capacity of the condenser that K forms with the unit disk.