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In the present thesis the MBE growth and sample characterization of HgTe structures is investigated
and discussed. Due to the first experimental discovery of the quantum Spin Hall effect
(QSHE) in HgTe quantum wells, this material system attains a huge interest in the spintronics
society. Because of the long history of growing Hg-based heterostructures here at the Experimentelle
Physik III in Würzburg, there are very good requirements to analyze this material
system more precisely and in new directions. Since in former days only doped HgTe quantum
wells were grown, this thesis deals with the MBE growth in the (001) direction of undoped
HgTe quantum wells, surface located quantum wells and three dimensional bulk layers. All
Hg-based layers were grown on CdTe substrates which generate strain in the layer stack and
provide therefore new physical effects. In the same time, the (001) CdTe growth was investigated
on n-doped (001) GaAs:Si because the Japanese supplier of CdTe substrates had a
supply bottleneck due to the Tohoku earthquake and its aftermath in 2011.
After a short introduction of the material system, the experimental techniques were demonstrated
and explained explicitly. After that, the experimental part of this thesis is displayed.
So, the investigation of the (001) CdTe growth on (001) GaAs:Si is discussed in chapter 4.
Firstly, the surface preparation of GaAs:Si by oxide desorption is explored and analyzed.
Here, rapid thermal desorption of the GaAs oxide with following cool down in Zn atmosphere
provides the best results for the CdTe due to small holes at the surface, while e.g. an atomic
flat GaAs buffer deteriorates the CdTe growth quality. The following ZnTe layer supplies the
(001) growth direction of the CdTe and exhibits best end results of the CdTe for 30 seconds
growth time at a flux ratio of Zn/Te ~ 1/1.2. Without this ZnTe layer, CdTe will grow in the
(111) direction. However, the main investigation is here the optimization of the MBE growth
of CdTe. The substrate temperature, Cd/Te flux ratio and the growth time has to be adjusted
systematically. Therefore, a complex growth process is developed and established. This optimized
CdTe growth process results in a RMS roughness of around 2.5 nm and a FWHM value
of the HRXRD w-scan of 150 arcsec. Compared to the literature, there is no lower FWHM
value traceable for this growth direction. Furthermore, etch pit density measurements show
that the surface crystallinity is matchable with the commercial CdTe substrates (around 1x10^4
cm^(-2)). However, this whole process is not completely perfect and offers still room for improvements.
The growth of undoped HgTe quantum wells was also a new direction in research in contrast
to the previous n-doped grown HgTe quantum wells. Here in chapter 5, the goal of very low
carrier densities was achieved and therefore it is now possible to do transport experiments in
the n - and p - region by tuning the gate voltage. To achieve this high sample quality, very precise
growth of symmetric HgTe QWs and their HRXRD characterization is examined. Here,
the quantum well thickness can now determined accurate to under 0.3 nm. Furthermore, the transport analysis of different quantum well thicknesses shows that the carrier density and
mobility increase with rising HgTe layer thickness. However, it is found out that the band
gap of the HgTe QW closes indirectly at a thickness of 11.6 nm. This is caused by the tensile
strained growth on CdTe substrates. Moreover, surface quantum wells are studied. These
quantum wells exhibit no or a very thin HgCdTe cap. Though, oxidization and contamination
of the surface reduces here the carrier mobility immensely and a HgCdTe layer of around 5 nm
provides the pleasing results for transport experiments with superconductors connected to the
topological insulator [119]. A completely new achievement is the realization of MBE growth
of HgTe quantum wells on CdTe/GaAs:Si substrates. This is attended by the optimization of
the CdTe growth on GaAs:Si. It exposes that HgTe quantum wells grown in-situ on optimized
CdTe/GaAs:Si show very nice transport data with clear Hall plateaus, SdH oscillations, low
carrier densities and carrier mobilities up to 500 000 cm^2/Vs. Furthermore, a new oxide etching
process is developed and analyzed which should serve as an alternative to the standard
HCl process which generates volcano defects at some time. However, during the testing time
the result does not differ in Nomarski, HRXRD, AFM and transport measurements. Here,
long-time tests or etching and mounting in nitrogen atmosphere may provide new elaborate
results.
The main focus of this thesis is on the MBE growth and standard characterization of HgTe bulk
layers and is discussed in chapter 6. Due to the tensile strained growth on lattice mismatched
CdTe, HgTe bulk opens up a band gap of around 22 meV at the G-point and exhibits therefore
its topological surface states. The analysis of surface condition, roughness, crystalline quality,
carrier density and mobility via Nomarski, AFM, XPS, HRXRD and transport measurements
is therefore included in this work. Layer thickness dependence of carrier density and mobility
is identified for bulk layer grown directly on CdTe substrates. So, there is no clear correlation
visible between HgTe layer thickness and carrier density or mobility. So, the carrier density is
almost constant around 1x10^11 cm^(-2) at 0 V gate voltage. The carrier mobility of these bulk
samples however scatters between 5 000 and 60 000 cm^2/Vs almost randomly. Further experiments
should be made for a clearer understanding and therefore the avoidance of unusable
bad samples.But, other topological insulator materials show much higher carrier densities and
lower mobility values. For example, Bi2Se3 exhibits just density values around 1019 cm^(-2)
and mobility values clearly below 5000 cm2/Vs. The carrier density however depends much
on lithography and surface treatment after growth. Furthermore, the relaxation behavior and
critical thickness of HgTe grown on CdTe is determined and is in very good agreement with
theoretical prediction (d_c = 155 nm). The embedding of the HgTe bulk layer between HgCdTe
layers created a further huge improvement. Similar to the quantum well structures the carrier
mobility increases immensely while the carrier density levels at around 1x10^11 cm^(-2) at 0
V gate voltage as well. Additionally, the relaxation behavior and critical thickness of these
barrier layers has to be determined. HgCdTe grown on commercial CdTe shows a behavior as
predicted except the critical thickness which is slightly higher than expected (d_c = 850 nm).
Otherwise, the relaxation of HgCdTe grown on CdTe/GaAs:Si occurs in two parts. The layer
is fully strained up to 250 nm. Between 250 nm and 725 nm the HgCdTe film starts to relax
randomly up to 10 %. The relaxation behavior for thicknesses larger than 725 nm occurs than
linearly to the inverse layer thickness. A explanation is given due to rough interface conditions
and crystalline defects of the CdTe/GaAs:Si compared to the commercial CdTe substrate. HRXRD and AFM data support this statement. Another point is that the HgCdTe barriers protect the active HgTe layer and because of the high carrier mobilities the Hall measurements provide new transport data which have to be interpreted more in detail in the future. In addition, HgTe bulk samples show very interesting transport data by gating the sample from the top and the back. It is now possible to manipulate the carrier densities of the top and bottom surface states almost separately. The back gate consisting of the n-doped GaAs substrate and the thick insulating CdTe buffer can tune the carrier density for Delta(n) ~ 3x10^11 cm^(-2). This is sufficient to tune the Fermi energy from the p-type into the n-type region [138].
In this thesis it is shown that strained HgTe bulk layers exhibit superior transport data by embedding between HgCdTe barrier layers. The n-doped GaAs can here serve as a back gate.
Furthermore, MBE growth of high crystalline, undoped HgTe quantum wells shows also new
and extended transport output. Finally, it is notable that due to the investigated CdTe growth
on GaAs the Hg-based heterostructure MBE growth is partially independent from commercial
suppliers.
This doctoral thesis investigates magneto-optical properties of mercury telluride layers grown tensile strained on cadmium telluride substrates. Here, layer thicknesses start above the usual quantum well thickness of about 20 nm and have a upper boundary around 100 nm due to lattice relaxation effects. This kind of layer system has been attributed to the material class of three-dimensional topological insulators in numerous publications. This class stands out due to intrinsic boundary states which cross the energetic band gap of the layer's bulk.
In order to investigate the band structure properties in a narrow region around the Fermi edge, including possible boundary states, the method of highly precise time-domain Terahertz polarimetry is used. In the beginning, the state of the art of Teraherz technology at the start of this project is discussed, moving on to a detailed description and characterization of the self-built measurement setup. Typical standard deviation of a polarization rotation or ellipticity measurement are on the order of 10 to 100 millidegrees, according to the transmission strength through investigated samples. A range of polarization spectra, depending on external magnetic fields up to 10 Tesla, can be extracted from the time-domain signal via Fourier transformation.
The identification of the actual band structure is done by modeling possible band structures by means of the envelope function approximation within the framework of the k·p method. First the bands are calculated based on well-established model parameters and from them the possible optical transitions and expected ellipticity spectra, all depending on external magnetic fields and the layer's charge carrier concentration. By comparing expected with measured spectra, the validity of k·p models with varying depths of detail is analyzed throughout this thesis. The rich information encoded in the ellipitcity spectra delivers key information for the attribution of single optical transitions, which are not part of pure absorption spectroscopy. For example, the sign of the ellipticity signals is linked to the mix of Landau levels which contribute to an optical transition, which shows direct evidence for bulk inversion asymmetry effects in the measured spectra.
Throughout the thesis, the results are compared repeatedly with existing publications on the topic. It is shown that the models used there are often insufficient or, in worst case, plainly incorrect. Wherever meaningful and possible without greater detours, the differences to the conclusions that can be drawn from the k·p model are discussed.
The analysis ends with a detailed look on remaining differences between model and measurement. It contains the quality of model parameters as well as different approaches to integrate electrostatic potentials that exist in the structures into the model.
An outlook on possible future developments of the mercury cadmium telluride layer systems, as well as the application of the methods shown here onto further research questions concludes the thesis.
The presented thesis summarizes the results from four and a half years of intense lithography development on (Cd,Hg)Te/HgTe/(Cd,Hg)Te quantum well structures. The effort was motivated by the unique properties of this topological insulator. Previous work from Molenkamp at al.\ has proven that the transport through such a 2D TI is carried by electrons with opposite spin, counter-propagating in 1D channels along the sample edge. However, up to this thesis, the length of quantized spin Hall channels has never been reported to exceed 4 µm. Therefore, the main focus was put on a reproducible and easy-to-handle fabrication process that reveals the intrinsic material parameters.
Every single lithography step in macro as well as microscopic sample fabrication has been re-evaluated. In the Development, the process changes have been presented along SEM pictures, microgaphs and, whenever possible, measurement responses.
We have proven the conventional ion milling etch method to damage the remaining mesa and result in drastically lower electron mobilities in samples of microscopic size.
The novel KI:I2:HBr wet etch method for macro and microstructure mesa fabrication has been shown to leave the crystalline structure intact and result in unprecedented mobilities, as high as in macroscopic characterization Hall bars. Difficulties, such as an irregular etch start and slower etching of the conductive QW have been overcome by concentration, design and etch flow adaptations. In consideration of the diffusive regime, a frame around the EBL write field electrically decouples the structure mesa from the outside wafer. As the smallest structure, the frame is etched first and guarantees a non-different etching of the conductive layer during the redox reaction. A tube-pump method assures reproducible etch results with mesa heights below 300 nm. The PMMA etch mask is easy to strip and leaves a clean mesa with no redeposition. From the very first attempts, to the final etch process, the reader has been provided with the characteristics and design requirements necessary to enable the fabrication of nearly any mesa shape within an EBL write field of 200 µm.
Magneto resistance measurement of feed-back samples have been presented along the development chronology of wet etch method and subsequent lithography steps. With increasing feature quality, more and more physics has been revealed enabling detailed evaluation of smallest disturbances. The following lithography improvements have been implemented. They represent a tool-box for high quality macro and microstructure fabrication on (CdHg)Te/HgTe of almost any kind.
The optical positive resist ECI 3027 can be used as wet and as dry etch mask for structure sizes larger than 1 µm. It serves to etch mesa structures larger than the EBL write field.
The double layer PMMA is used for ohmic contact fabrication within the EBL write field. Its thickness allows to first dry etch the (Cd,Hg)Te cap layer and then evaporate the AuGe contact, in situ and self-aligned. Because of an undercut, up to 300 nm can be metalized without any sidewalls after the lift-off. An edge channel mismatch within the contact leads can be avoided, if the ohmic contacts are designed to reach close to the sample and beneath the later gate electrode.
The MIBK cleaning step prior to the gate application removes PMMA residuals and thereby improves gate and potential homogeneity.
The novel low HfO2-ALD process enables insulator growth into optical and EBL lift-off masks of any resolvable shape. Directly metalized after the insulator growth, the self-aligned method results in thin and homogeneous gate electrode reproducibly withholding gate voltages to +-10 V.
The optical negative resist ARN 4340 exhibits an undercut when developed. Usable as dry etch mask and lift-off resist, it enables an in-situ application of ohmic contacts first etching close to the QW, then metalizing AuGe. Up to 500 nm thickness, the undercut guarantees an a clean lift-off with no sidewalls.
The undertaken efforts have led to micro Hall bar measurements with Hall plateaus and SdH-oszillations in up to now unseen levels of detail.
The gap resistance of several micro Hall bars with a clear QSH signal have been presented in Quantum Spin Hall. The first to exhibit longitudinal resistances close to the expected h/2e2 since years, they reveal unprecedented details in features and characteristics. It has been shown that their protection against backscattering through time reversal symmetry is not as rigid as previously claimed. Values below and above 12.9 kΩ been explained, introducing backscattering within the Landauer-Büttiker formalism of edge channel transport. Possible reasons have been discussed. Kondo, interaction and Rashba-backscattering arising from density inhomogeneities close to the edge are most plausible to explain features on and deviations from a quantized value. Interaction, tunneling and dephasing mechanisms as well as puddle size, density of states and Rashba Fields are gate voltage dependent. Therefore, features in the QSH signal are fingerprints of the characteristic potential landscape.
Stable up to 11 K, two distinct but clear power laws have been found in the higher temperature dependence of the QSH in two samples. However, with ΔR = Tα, α = ¼ in one (QC0285) and α = 2 in the other (Q2745), none of the predicted dependencies could be confirmed. Whereas, the gap resistances of QC0285 remains QSH channel dominated up to 3.9 T and thereby confirmed the calculated lifting of the band inversion in magnetic field. The gate-dependent oscillating features in the QSH signal of Q2745 immediately increase in magnetic field. The distinct field dependencies allowed the assumption of two different dominant backscattering mechanisms.
Resulting in undisturbed magneto transport and unprecedented QSH measurements The Novel Micro Hall Bar Process has proven to enable the fabrication of a new generation of microstructures.
Within the scope of this thesis two main topics have been investigated: the examination of micromagnetic sensors and transport of massive and massless Dirac fermions in HgTe quantum wells. For the investigation of localized, inhomogeneous magnetic fields, the fabrication and characterization of two different non-invasive and ultra sensitive sensors has been established at the chair ”Experimentelle Physik” of the University of Würzburg. The first sensor is based on the young technique named micro-Hall magnetometry. The necessary semiconductor devices (Hall cross structures) were fabricated by high-resolution electron beam lithography based on two different two dimensional electron gases (2DEGs), namely InAs/(Al,Ga)Sb- and HgTe/(Hg,Cd)Te- heterostructures. The characteristics have been examined in two different ways. Measurements in homogeneous magnetic fields served for characterization of the sensors, whereas the investigation of artificially produced sub-µm magnets substantiates the suitability of the devices for the study of novel nanoscale magnetic materials (e.g. nanowires). Systematic experiments with various magnets are in accordance with the theory of single-domain particles and anisotropic behavior due to shapes with high aspect ratio. The highest sensitivity for strongly localized fields was obtained at T = 4.2 K for a (200x200) nm^2 Hall cross - made from shallow, high mobility HgTe 2DEG. Although the field resolution was merely δB ≈ 100 µT, the nanoscale sensor size yields an outstanding flux resolution of δΦ = 2 10^(−3) Φ0, where Φ0 = h/2e is the flux quantum. Translating this result in terms of magnetic moment, the sensitivity allows for the detection of magnetization changes of a particle centered on top of the sensor as low as δM ≈ 10^2 µB, with the magnetic moment of a single electron µB, the Bohr magneton. The further examination of a permalloy nanomagnet with a cross-section of (100x20) nm^2 confirms the expected resolution ability, extracted from the noise of the sensor. The observed high signal-to-noise ratio validates the detection limit of this sensor in terms of geometry. This would be reached for a magnet (same material) with quadratic cross-section for an edge length of 3.3 nm. Moreover, the feasibility of this sensor for operation in a wide temperature range (T = mK... > 200 K) and high magnetic fields has been confirmed. The second micromagnetic sensor is the micro-SQUID (micro-Superconducting-QUantum-Interference-Device) based on niobium. The typical sensor area of the devices built in this work was (1.0x1.0) µm^2, with constrictions of about 20 nm. The characterization of this device demonstrates an amazing field sensitivity (regarding its size) of δB < 1 µT. Even though the sensor was 25 times larger than the best micro-Hall sensor, it provided an excellent flux resolution in the order of δΦ ≈ 5 10^(−4) Φ0 and a similar magnetic moment resolution of δM ≈ 10^2 µB. Furthermore, the introduction of an ellipsoidal permalloy magnet (axes: 200 nm and 400 nm, thickness 30 nm) substantiates the suitability for the detection of minuscule, localized magnetic fields. The second part of the thesis deals with the peculiar transport properties of HgTe quantum wells. These rely on the linear contribution to the band structure inherent to the heterostructure. Therefore the system can be described by an effective Dirac Hamiltonian, whose Dirac mass is tunable by the variation of the quantum well thickness. By fabrication and characterization of a systematical series of substrates, a system with vanishing Dirac mass (zero energy gap) has been confirmed. This heterostructure therefore resembles graphene (a monolayer of graphite), with the difference of exhibiting only one valley in the energy dispersion of the Brillouin zone. Thus parasitical intervalley scattering cannot occur. The existence of this system has been proven by the agreement of theoretical predictions, based on widely accepted band structure calculations with the experiment (Landau level dispersion, conductivity). Furthermore, another particularity of the band structure - the transition from linear to parabolic character - has been illustrated by the widths of the plateaus in the quantum Hall effect. Finally, the transport of ”massive” Dirac fermions (with finite Dirac mass) is investigated. In particular the describing Dirac Hamiltonian induces weak localization effects depending on the Dirac mass. This mechanism has not been observed to date, and survives in higher temperatures compared to typical localization mechanisms.
Although spintronics has aroused increasing interest, much fundamental research has to be done. One important issue is the control over the electronic spin. Therefore, spin and phase coherent transport are very important phenomena. This thesis describes experiments with mercury based quantum well structures. This narrow gap material provides a very good template to study spin related effects. It exhibits large Zeeman spin splitting and Rashba spin-orbit splitting. The latter is at least four to five times larger than in III-V semiconductors. Initially a short review on the transport theory was presented. The main focus as on quantisation effects that are important to understand the related experiments. Thus, Shubnikov-de Haas and the quantum Hall effect have been analysed. Due to the first fabrication of nanostructures on Hg-based quantum well samples, the observation of ballistic transport effects could be expected. Hence, the Landauer-B¨uttiker theory has been introduced which gives the theoretical background to understand such effects. With respect to the main topic of this thesis, phase coherence has been introduced in detail. Experiments, where coherence effects could be observed, have been explained theoretically. Here, possible measurement setups have been discussed, e.g., a ring shaped structure to investigate the Aharonov-Bohm and related effects. Due to the fact, that all experiments, described in this thesis, were performed on Hg-based samples, the exceptional position of such samples among the “classical” semiconductors has been clarified. Hg1-xMnx Te quantum wells are type-III QWs in contrast to the type-I QWs formed by e.g., GaAs/AlGaAs heterostructures. With a well width of more than 6 nm and a manganese content of less than 7% they exhibit an inverted band alignment. Band structure calculations based on self consistent Hartree calculations have been presented. The common description of a diluted magnetic semiconductor with the Brillouin function has been introduced and the experiments to obtain the empiric parameters T0 and S0 have been presented. Rashba spin-orbit splitting and giant Zeeman splitting have been explained theoretically and the magnetic ordering of a spin glass as well as the relevant interactions therein have been discussed. The next chapter describes the first realisation of nanostructures on Hg-based heterostructures. Several material specific problems have been solved, but the unique features of this material system mentioned above justify the effort. Interesting new insight could be found and will be found with these structures. Onto a series of QW samples, cross-shaped structures with several lead widths have been patterned. With the non-local resistance measurement setup, evidence for quasiballistic transport was demonstrated in cross-shaped structures with lead widths down to 0.45 mm. The non-local bend resistance and a regime of rebound trajectories as well as the anomalous Hall effect could be identified. Monte-Carlo simulations of the classical electron trajectories have been performed. A good agreement with the experimental data has been achieved by taking a random scattering process into account. Encouraged by this success the technology has been improved and ring-shaped structures with radii down to 1 mm have been fabricated. Low temperature (below 100 mK), four terminal resistance measurements exhibit clear Aharonov-Bohm oscillations. The period of the oscillations agrees very well with a calculation that takes only the sample geometry into account. One goal using such a structure is the experimental prove of the spin-orbit Berry phase. Therefore an additional Shottky gate on top of the ring was needed. With this structure evidence for the Aharonov-Casher effect was observed. Here, a perpendicular applied electric field causes analogous oscillations as does the magnetic field in the AB effect. A subsequent change in the Rashba SO splitting due to several applied gate voltages while measuring the AB effect should reveal the SO Berry phase. Although initially evidence of a phase change was detected, a clear proof for the direct measurement of the SO Berry phase could not be found. In the future, with an advanced sample structure, e.g., with an additional Hall bar next to the ring, which permits a synchronous measurement of the Rashba splitting, it might be possible to measure the SO Berry phase directly. In manganese doped HgTe QWs two different effects simultaneously cause spin splitting: the giant Zeeman and the Rashba effect. By analysing the Shubnikovde Haas oscillations and the node positions of their beating pattern, it has been possible to separate these two effects. Whereas the Rashba effect can be identified by its dependence on the structure inversion asymmetry, varied by the applied gate voltage, the giant Zeeman splitting is extracted from its strong temperature dependence, because Rashba splitting is temperature independent. The analysis revealed, that the Rashba splitting is larger than or comparable to the giant Zeeman splitting even at moderately high magnetic fields. In an extraordinary HgMnTe QW sample, that exhibits the n= 1 quantum Hall plateau from less than 1 T up to 28 T, the anomalous Hall effect could be excluded. Intense studies on the temperature dependence of the QHE as well as band structure calculations have revealed this extraordinary behaviour to be an ordinary band structure effect of this system. In a series of mesoscopic structures on nonmagnetic and magnetic QWs, an investigation of the universal conductance uctuations have been carried out. In the
Novel appraches to the molecular beam epitaxy of core-shell nanowires in the group II telluride material system were explored in this work. Significant advances in growth spurred the development of a flexible and reliable platform for a charge transport characterization of the topological insulator HgTe in a tubular nanowire geometry. The transport results presented provide an important basis for the design of future studies that strive for the experimental realization of topological charge transport in the quantum wire limit.
A novel growth method has been developed, allowing for the growth of strained HgTe shells on CdTe nanowires (NWs). The growth of CdTe-HgTe core-shell NWs required high attention in controlling basic parameters like substrate temperature and the intensity of supplied material fluxes. The difficulties in finding optimized growth conditions have been successfully overcome in this work.
We found the lateral redistribution of liquid growth seeds with a ZnTe growth start to be crucial to trigger vertical CdTe NW growth. Single crystalline zinc blende CdTe NWs grew, oriented along [111]B. The substrate temperature was the most critical parameter to achieve straight and long wires. In order to adjust it, the growth was monitored by reflection high-energy electron diffraction, which was used for fine tuning of the temperature over time in each growth run individually. For optimized growth conditions, a periodic diffraction pattern allowed for the detailed analysis of atomic arrangement on the surfaces and in the bulk. The ability to do so reflected the high crystal quality and ensemble uniformity of our CdTe NWs. The NW sides were formed by twelve stable, low-index crystalline facets. We observed two types stepped and polar sides, separated by in total six flat and non-polar facets.
The high crystalline quality of the cores allowed to grow epitaxial HgTe shells around. We reported on two different heterostructure geometries. In the first one, the CdTe NWs exhibit a closed HgTe shell, while for the second one, the CdTe NWs are overgrown mainly on one side. Scanning electron microscopy and scanning transmission electron microscopy confirmed, that many of the core-shell NWs are single crystalline zinc blende and have a high uniformity. The symmetry of the zinc blende unit cell was reduced by residual lattice strain. We used high-resolution X-ray diffraction to reveal the strain level caused by the small lattice mismatch in the heterostructures. Shear strain has been induced by the stepped hetero-interface, thereby stretching the lattice of the HgTe shell by 0.06 % along a direction oriented with an angle of 35 ° to the interface.
The different heterostructures obtained, were the base for further investigation of quasi-one-dimensional crystallites of HgTe. We therefore developed methods to reliably manipulate, align, localize and contact individual NWs, in order to characterize the charge transport in our samples. Bare CdTe cores were insulating, while the HgTe shells were conducting. At low temperature we found the mean free path of charge carriers to be smaller, but the phase coherence length to be larger than the sample size of several hundred nanometers. We observed universal conductance fluctuations and therefore drew the conclusion, that the trajectories of charge carriers are defined by elastic backscattering at randomly distributed scattering sites. When contacted with superconducting leads, we saw induced superconductivity, multiple Andreev reflections and the associated excess current. Thus, we achieved HgTe/superconductor interfaces with high interfacial transparency.
In addition, we reported on the appearance of peaks in differential resistance at Delta/e for HgTe-NW/superconductor and 2*Delta/e for superconductor/HgTe-NW/superconductor junctions, which is possibly related to unconventional pairing at the HgTe/superconductor interface. We noticed that the great advantage of our self-organized growth is the possibility to employ the metallic droplet, formerly seeding the NW growth, as a superconducting contact. The insulating wire cores with a metallic droplet at the tip have been overgrown with HgTe in a fully in-situ process. A very high interface quality was achieved in this case.
Seit 1988 werden mit dem Verfahren der Molekularstrahlepitaxie (MBE: Molecular Beam Epitaxy) am Physikalischen Institut der Universität Würzburg Halbleiterheterostrukturen aus dem Halbleitermaterialsystem Hg(1-x)Cd(x)Te hergestellt. Diese quecksilberhaltige Legierung ist ein II-VI-Verbindungshalbleiter und zeichnet sich durch eine legierungs- und temperaturabhängige fundamentale Energielücke aus. Die Bandstruktur ist je nach Temperatur und Legierungsfaktor x einerseits halbleitend, anderseits aber halbmetallisch. Die schmallückigen Hg(1-x)Cd(x)Te-Legierungen werden als Infrarotdetektoren eingesetzt. Mit dem Verfahren der Molekularstrahlepitaxie ist es möglich Bandstrukturen mit spezifischen Eigenschaften herzustellen (band structure engineering). Unter diesen neuen Materialien stellen die Typ-III-Übergitter eine besondere Klasse dar. Bei diesen zweidimensionalen Materialstrukturen wird eine nur wenige Atomlagen dicke Schicht von 30 °A bis 100 °A aus dem Halbmetall HgTe, dem Trogmaterial, in eine Legierung aus Hg(1-x)Cd(x)Te, dem Barrierenmaterial, eingebettet und zu einem Übergitter aufgebaut. Zweidimensionale Typ-III-Halbleiterheterostrukturen, wie die HgTe-Hg(1-x)Cd(x)Te-Quantentrogstrukturen und HgTe-Hg(1-x)Cd(x)Te-Übergitter, sind von fundamentalen Interesse zum Verständnis von elektronischen Zuständen komplexer Bandstrukturen und zweidimensionaler Ladungsträgersysteme. Darüber hinaus werden HgTe-Hg(1-x)Cd(x)Te-Übergitter in der Sensorik als Infrarotdektoren eingesetzt, deren cut-off-Wellenlänge prozessgesteuert in der Molekularstrahlepitaxie über die Trogbreite, der Schichtdicke des HgTe, eingestellt werden kann. Je nach verwendeten Barrierenmaterial Hg(1-x)Cd(x)Te und Temperatur besitzen die Übergitterstrukturen mit großen Barrierenschichtdicken, das sind die Quantentrogstrukturen, in Abhängigkeit von der Trogbreite, für niedrige Trogbreiten eine normal halbleitende Subbandstruktur, während sich für größere Trogbreiten eine invertiert halbleitende Subbandstruktur einstellt. In der invertiert halbleitenden Subbandstruktur ist ein indirekter Halbleiter realisierbar. Bei Strukturen mit dünnen Barrierenschichtdicken ist die Minibanddispersion stark ausgeprägt und es kann sich zusätzlich eine halbmetallische Subbandstruktur ausbilden. Diese speziellen Eigenschaften sind einzigartig und kennzeichnen die komplexe Bandstruktur von Typ-III-Heterostrukturen. Erst die genaue Kenntnis und ein vertieftes Verständnis der komplexen Bandstruktur erlaubt die Interpretation von Ergebnissen aus (magneto)-optischen Untersuchungen der elektronischen Eigenschaften von Typ-III-Halbleiterheterostrukturen. Die Berechnung der elektronischen Zustände in den HgTe-Hg(1-x)Cd(x)Te-Übergitter wurde in der vorliegenden Arbeit in der Envelopefunktionsnäherung durchgeführt. Seit drei Jahrzehnten wird die Envelopefunktionenn¨aherung (EFA: Envelope Function Approximation) sehr erfolgreich bei der Interpretation der experimentellen Ergebnisse von (magneto)- optischen Untersuchungen an Halbleiterheterostrukturen eingesetzt. Der Erfolg basiert auf der effektiven Beschreibung der quantisierten, elektronischen Zustände an Halbleitergrenzflächen, in Quantentrögen und Übergittern und der Einzigartigkeit, zur Berechnung der experimentellen Ergebnisse, die Abhängigkeit von äußeren Parametern, wie der Temperatur und des hydrostatischen Druckes, aber auch eines elektrischen und magnetischen Feldes, wie auch von freien Ladungsträgern, ein zu arbeiten. Die sehr gute quantitative Übereinstimmung der theoretischen Berechnungen in der Envelopefunktionennäherung und vieler experimenteller Messergebnisse an Halbleiterheterostrukturen baut auf der quantitativen Bestimmung der relevanten Bandstrukturparameter in der k·p-Störungstheorie zur Beschreibung der elektronischen Eigenschaften der beteiligten Volumenhalbleiter auf. In Kapitel 1 der vorliegenden Arbeit wird daher zunächst das Bandstrukturmodell des Volumenmaterials Hg(1-x)Cd(x)Te vorgestellt und daraus die Eigenwertgleichung des Hamilton-Operators in der Envelopefunktionenn¨aherung abgeleitet. Danach wird das L¨osungsverfahren, die Matrixmethode, zur Berechnung der Eigenwerte und Eigenfunktionen beschrieben und auf die Berechnung der elektronischen Subbandzustände der Typ-III-Hg(1-x)Cd(x)Te-Übergitter angewendet. Es folgt eine Diskussion der grundlegenden Eigenschaften der komplexen Bandstruktur in den verschiedenen Regimen der Typ-III-Halbleiterheterostrukturen und der charakteristischen Wellenfunktionen, den Grenzflächenzuständen. An Ende dieses Kapitels wird die Berechnung des Absorptionskoeffizienten hergeleitet und die grundlegenden Eigenschaften der Diplomatrixelemente zur Charakterisierung der optischen Eigenschaften von HgTe-Hg(1-x)Cd(x)Te-Übergitter exemplarisch vorgestellt. In Kapitel 2 sind die wesentlichen Ergebnisse aus dem Vergleich von Infrarotabsorptionsmessungen an HgTe-Hg(1-x)Cd(x)Te-Übergitter mit den berechneten Absorptionskoeffizienten zusammengestellt.
The subject of this thesis is the control of strain in HgTe thin-film crystals. Such systems are members of the new class of topological insulator materials and therefore of special research interest. A major task was the experimental control of the strain in the HgTe films. This was achieved by a new epitaxial approach and confirmed by cristallographic analysis and magneto-transport measurements.
In this work, strain was induced in thin films by means of coherent epitaxy on substrate crystals. This means that the film adopts the lattice constant of the substrate in the plane of the substrate-epilayer interface. The level of strain is determined by the difference between the strain-free lattice constants of the substrate and epilayer material (the so-called lattice mismatch). The film responds to an in-plane strain with a change of its lattice constant perpendicular to the interface. This relationship is crucial for both the correct interpretation of high resolution X-ray diffraction (HRXRD) measurements, and the precise determination of the band dispersion. The lattice constant of HgTe is smaller than the lattice constant of CdTe. Therefore, strain in HgTe is tensile if it is grown on a CdTe substrate. In principle, compressive strain can be achieved by using an appropriate \(\text{Cd}_{1-x}\text{Zn}_{x}\text{Te}\) substrate. This concept was modified and applied in this work.
Epilayers have been fabricated by molecular-beam epitaxy (MBE). The growth of thick buffer layers of CdTe on GaAs:Si was established as an alternative to commercial CdTe and \(text{Cd}_{0.96}\text{Zn}_{0.04}\text{Te}\) substrates. The growth conditions have been optimized by an analysis of atomic force microscopy and HRXRD studies. HRXRD measurements reveal a power-law increase of the crystal quality with increasing thickness. Residual strain was found in the buffer layers, and was attributed to a combination of finite layer thickness and mismatch of the thermal expansion coefficients of CdTe and GaAs. In order to control the strain in HgTe epilayers, we have developed a new type of substrate with freely adjustable lattice constant.
CdTe-\(\text{Cd}_{0.5}\text{Zn}_{0.5}\text{Te}\) strained-layer-superlattices have been grown by a combination of MBE and atomic-layer epitaxy (ALE), and have been analyzed by HRXRD. ALE of the \(\text{Cd}_{0.5}\text{Zn}_{0.5}\text{Te}\) layer is self-limiting to one monolayer, and the effective lattice constant can be controlled reproducibly and straightforward by adjusting the CdTe layer thickness. The crystal quality has been found to degrade with increasing Zn-fraction. However, the effect is less drastic compared to single layer \(\text{Cd}_{1-x}\text{Zn}_{x}\text{Te}\) solid solutions. HgTe quantum wells (QWs) sandwiched in between CdHgTe barriers have been fabricated in a similar fashion on superlattices and conventional CdTe and \(\text{Cd}_{0.96}\text{Zn}_{0.04}\text{Te}\) substrates. The lower critical thickness of the CdHgTe barrier material grown on superlattice substrates had to be considered regarding the sample design. The electronic properties of the QWs depend on the strain and thickness of the QW. We have determined the QW thickness with an accuracy of \(\pm\)0.5 nm by an analysis of the beating patterns in the thickness fringes of HRXRD measurements and X-ray reflectometry measurements. We have, for the first time, induced compressive strain in HgTe QWs by an epitaxial technique (i.e. the effective lattice constant of the superlattice is lower compared to the lattice constant of HgTe). The problem of the lattice mismatch between superlattice and barriers has been circumvented by using CdHgTe-ZnHgTe superlattices instead of CdHgTe as a barrier material. Furthermore, the growth of compressively strained HgTe bulk layers (with a thickness of at least 50 nm) was demonstrated as well.
The control of the state of strain adds a new degree of freedom to the design of HgTe epilayers, which has a major influence on the band structure of QWs and bulk layers. Strain in bulk layers lifts the degeneracy of the \(\Gamma_8\) bands at \(\mathbf{k}=0\). Tensile strain opens an energy gap, compressive strain shifts the touching points of the valence- and conduction band to positions in the Brillouin zone with finite \(\mathbf{k}\). Such a situation has been realized for the first time in the course of this work. For QWs in the inverted regime, it is demonstrated that compressive strain can be used to significantly enhance the thermal energy gap of the two-dimensional electron gas (2DEG). In addition, semi-metallic and semiconducting behavior is expected in wide QWs, depending on the state of strain. An examination of the temperature dependence of the subband ordering in QWs revealed that the band gap is only temperature-stable for appropriate sample parameters and temperature regimes. The band inversion is always lifted for sufficiently high temperatures.
A large number of models investigate the influence of the band gap on the stability of the quantum-spin-Hall (QSH) effect. An enhancement of the stability of QSH edge state conductance is expected for enlarged band gaps. Furthermore, experimental studies on the temperature dependence of the QSH conductance are in contradiction to theoretical predictions. Systematic studies of these aspects have become feasible based on the new flexibility of the sample design.
Detailed low-temperature magnetotransport studies have been carried out on QWs and bulk layers. For this purpose, devices have been fabricated lithographically, which consist of two Hall-bar geometries with different dimensions. This allows to discriminate between conductance at the plane of the 2DEG and the edge of the sample. The Fermi energy in the 2DEG has been adjusted by means of a top gate electrode. The strain-induced transition from semi-metallic to semiconducting characteristics in wide QWs was shown. The magnitude of the semi-metallic overlap of valence- and conduction band was determined by an analysis of the two-carrier conductance and is in agreement with band structure calculations. The band gap of the semiconducting sample was determined by measurements of the temperature dependence of the conductance at the charge-neutrality point. Agreement with the value expected from theory has been achieved for the first time in this work. The influence of the band gap on the stability of QSH edge state conductance has been investigated on a set of six samples. The band gap of the set spans a range of 10 to 55 meV. The latter value has been achieved in a highly compressively strained QW, has been confirmed by temperature-dependent conductance measurements, and is the highest ever reported in the inverted regime. Studies of the carrier mobility reveal a degradation of the sample quality with increasing Zn-fraction in the superlattice, in agreement with HRXRD observations. The enhanced band gap does not suppress scattering mechanisms in QSH edge channels, but lowers the conductance in the plane of the 2DEG. Hence, edge state conductance is the dominant conducting process even at elevated temperatures. An increase in conductance with increasing temperature has been found, in agreement with reports from other groups. The increase follows a power-law dependency, the underlying physical mechanism remains open. A cause for the lack of an increase of the QSH edge state conductance with increasing energy gap has been discussed. Possibly, the sample remains insulating even at finite carrier densities, due to localization effects. The measurement does not probe the QSH edge state conductance at the situation where the Fermi energy is located in the center of the energy gap, but in the regime of maximized puddle-driven scattering. In a first set of measurements, it has been shown that the QSH edge state conductance can be influenced by hysteretic charging effects of trapped states in the insulating dielectric. A maximized conductance of \(1.6\ \text{e}^2/\text{h}\) was obtained in a \(58\ \mu\text{m}\) edge channel. Finally, measurements on three dimensional samples have been discussed. Recent theoretical works assign compressively strained HgTe bulk layers to the Weyl semi-metal class of materials. Such layers have been synthesized and studied in magnetotransport experiments for the first time. Pronounced quantum-Hall- and Shubnikov-de-Haas features in the Hall- and longitudinal resistance indicate two-dimensional conductance on the sample surface. However, this conductance cannot be assigned definitely to Weyl surface states, due to the inversion of \(\Gamma_6\) and \(\Gamma_8\) bands. If a magnetic field is aligned parallel to the current in the device, a decrease in the longitudinal resistance is observed with increasing magnetic field. This is a signature of the chiral anomaly, which is expected in Weyl semi-metals.
The motivation for this work has been contributing a step to the advancement of technology. A next leap in technology would be the realization of a scalable quantum computer. One potential route is via topological quantum computing. A profound understanding of topological materials is thus essential. My work contributes by the investigation of the exemplary topological material HgTe. The focus lies on the understanding of the topological surface states (TSS) and new possibilities to manipulate them appropriately. Traditionally top gate electrodes are used to adjust the carrier density in such semi-conductor materials. We found that the electric field of the top gate can further alter the properties of the HgTe layer. The formation of additional massive Volkov-Pankratov states limits the accessibility of the TSS. The understanding of these states and their interplay with the TSS is necessary to appropriately design devices and to ensure their desired properties. Similarly, I observed the existence and stability of TSSs even without a bandgap in the bulk band structure in the inversion induced Dirac semi-metal phase of compressively strained HgTe. The finding of topological surface states in inversion-induced Dirac semi-metals provides a consistent and simple explanation for the observation reported for \(\text{Cd}_3\text{As}_2\).
These observations have only been possible due to the high quality of the MBE grown HgTe layers and the access of different phases of HgTe via strain engineering. As a starting point I performed Magneto-transport measurements on 67 nm thick tensilely strained HgTe layers grown on a CdTe substrate. We observed multiple transport channels in this three-dimensional topological insulator and successfully identified them. Not only do the expected topological surface states exist, but also additional massive surface states have been observed. These additional massive surface states are formed due to the electrical field applied at the top gate, which is routinely used to vary the carrier density in the HgTe layer. The additional massive surface states are called Volkov-Pankratov states after B. A. Volkov and O. A. Pankratov. They predicted the existence of similar massive surface states at the interface of materials with mutually inverted bands. We first found indications for such massive Volkov-Pankratov states in high-frequency compressibility measurements for very high electron densities in a fruitful collaboration with LPA in Paris. Magneto-transport measurements and \(k \cdot p\) calculations revealed that such Volkov-Pankratov states are also responsible for the observed whole transport. We also found indications for similar massive VPS in the electron regime, which coexist with the topological surface states. The topological surface states exist over the full investigated gate range including a regime of pure topological insulator transport. To increase the variability of the topological surface states we introduced a modulation doping layer in the buffer layer. This modulation doping layer also enabled us to separate and identify the top and bottom topological surface states.
We used the variability of the bulk band structure of HgTe with strain to engineer the band structure of choice using virtual substrates. The virtual substrates enable us to grow compressively strained HgTe layers that do not possess a bandgap, but instead linear crossing points. These layers are predicted to beDirac semi-metals. Indeed I observed also topological surface states and massive Volkov-Pankratov states in the compressively strained Dirac semi-metal phase. The observation of topological surfaces states also in the Dirac semi-metal phase has two consequences: First, it highlights that no bulk bandgap is necessary to observe topological surface states. Second, the observation of TSS also in the Dirac semi-metal phase emphasizes the importance of the underlying band inversion in this phase. I could not find any clear signatures of the predicted disjoint topological surface states, which are typically called Fermi-arcs. The presence of topological surface states and massive Volkov-Pankratov states offer a simple explanation for the observed quantum Hall effect and other two-dimensional transport phenomena in the class of inversion induced Dirac semi-metals, as \(\text{Cd}_3\text{As}_2\). This emphasizes the importance of the inherent bulk band inversion of different topological materials and provides a consistent and elegant explanation for the observed phenomena in these materials. Additionally, it offers a route to design further experiments, devices, and thus the foundation for the induction of superconductivity and thus topological quantum computing.
Another possible path towards quantum computing has been proposed based on the chiral anomaly. The chiral anomaly is an apparent transport anomaly that manifests itself as an additional magnetic field-driven current in three-dimensional topological semimetals with a linear crossing point in their bulk band structure. I observed the chiral anomaly in compressively strained HgTe samples and performed multiple control experiments to identify the observed reduction of the magnetoresistance with the chiral anomaly. First, the dependence of the so-called negative magnetoresistance on the angle and strength of the magnetic field has been shown to fit the expectation for the chiral anomaly. Second, extrinsic effects as scattering could be excluded as a source for the observed negative MR using samples with different mobilities and thus impurity concentrations. Third, the necessity of the linear crossing point has been shown by shifting the electrochemical potential away from the linear crossing points, which diminished the negative magnetoresistance. Fourth, I could not observe a negative magnetoresistance in the three-dimensional topological insulator phase of HgTe. These observations together prove the existence of the chiral anomaly and verify compressively strained HgTe as Dirac semi-metal. Surprisingly, the chiral anomaly is also present in unstrained HgTe samples, which constitute a semi-metal with a quadratic band touching point. This observation reveals the relevance of the Zeeman effect for the chiral anomaly due to the lifting of the spin-degeneracy in these samples. Additionally to the chiral anomaly, the Dirac semi-metal phase of compressively strained HgTe showed other interesting effects. For low magnetic fields, a strong weak-antilocalization has been observed. Such a strong weak-anti-localization correction in a three-dimensional layer is surprising and interesting. Additionally, non-trivial magnetic field strength and direction dependencies have been observed. These include a strong positive magnetoresistance for high magnetic fields, which could indicate a metal-insulator transition. On a more device-oriented note, the semi-metal phase of unstrained HgTe constitutes the lower limit of the by strain engineering adjustable minimal carrier density of the topological surface states and thus of very high mobility.
To sum up, topological surface states have been observed in the three-dimensional topological insulator phase and the Dirac semi-metal phase of HgTe. The existence and accessibility of topological surface states are thus independent of the existence of a bandgap in the bulk band structure. The topological surface states can be accompanied by massive Volkov-Pankratov states. These VPS are created by electric fields, which are routinely applied to adjust the carrier density in semiconductor devices. The theoretical predicted chiral anomaly has been observed in the Dirac semi-metal phase of HgTe. In contrast to theoretical predictions, no indications for the Fermi-arc called disjoint surface states have been observed, but instead the topological and massive Volkov-Pankratov surface states have been found. These states are thus expected for all inversion-induced topological materials.