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Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research
Zitieren Sie bitte immer diese URN: urn:nbn:de:bvb:20-opus-241048
- In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits,In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, aging in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of composites. Thus, the laboratory system provides the unique possibility to image non-destructively structures in the range of 170–190 nanometers, even for high-density materials.…
Autor(en): | Dominik Müller, Jonas Graetz, Andreas Balles, Simon Stier, Randolf Hanke, Christian Fella |
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URN: | urn:nbn:de:bvb:20-opus-241048 |
Dokumentart: | Artikel / Aufsatz in einer Zeitschrift |
Institute der Universität: | Fakultät für Physik und Astronomie / Physikalisches Institut |
Sprache der Veröffentlichung: | Englisch |
Titel des übergeordneten Werkes / der Zeitschrift (Englisch): | Crystals |
ISSN: | 2073-4352 |
Erscheinungsjahr: | 2021 |
Band / Jahrgang: | 11 |
Heft / Ausgabe: | 6 |
Aufsatznummer: | 677 |
Originalveröffentlichung / Quelle: | Crystals 2021, 11(6), 677; https://doi.org/10.3390/cryst11060677 |
DOI: | https://doi.org/10.3390/cryst11060677 |
Allgemeine fachliche Zuordnung (DDC-Klassifikation): | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
Freie Schlagwort(e): | 3D X-ray microscopy; 3D reconstruction; X-ray; instrumentation; integrated circuits; laboratory; nano CT; nondestructive testing |
Datum der Freischaltung: | 10.01.2022 |
Datum der Erstveröffentlichung: | 12.06.2021 |
Open-Access-Publikationsfonds / Förderzeitraum 2021 | |
Lizenz (Deutsch): | CC BY: Creative-Commons-Lizenz: Namensnennung 4.0 International |