Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research
Please always quote using this URN: urn:nbn:de:bvb:20-opus-241048
- In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits,In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, aging in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of composites. Thus, the laboratory system provides the unique possibility to image non-destructively structures in the range of 170–190 nanometers, even for high-density materials.…
Author: | Dominik Müller, Jonas Graetz, Andreas Balles, Simon Stier, Randolf Hanke, Christian Fella |
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URN: | urn:nbn:de:bvb:20-opus-241048 |
Document Type: | Journal article |
Faculties: | Fakultät für Physik und Astronomie / Physikalisches Institut |
Language: | English |
Parent Title (English): | Crystals |
ISSN: | 2073-4352 |
Year of Completion: | 2021 |
Volume: | 11 |
Issue: | 6 |
Article Number: | 677 |
Source: | Crystals 2021, 11(6), 677; https://doi.org/10.3390/cryst11060677 |
DOI: | https://doi.org/10.3390/cryst11060677 |
Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
Tag: | 3D X-ray microscopy; 3D reconstruction; X-ray; instrumentation; integrated circuits; laboratory; nano CT; nondestructive testing |
Release Date: | 2022/01/10 |
Date of first Publication: | 2021/06/12 |
Open-Access-Publikationsfonds / Förderzeitraum 2021 | |
Licence (German): | CC BY: Creative-Commons-Lizenz: Namensnennung 4.0 International |