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In oxidischen Heterostrukturen rufen Neuordnung von Ladung und Spin eine Vielzahl von unerwarteten physikalischen Eigenschaften hervor. Die Möglichkeit, Leitfähigkeit, Magnetismus oder auch Hochtemperatur-Supraleitung zu kontrollieren, machen diese künstlich hergestellten Materialien vor allem in Hinblick auf eine zukünftige Anwendung in der Mikroelektronik äußerst interessant. Dies erfordert jedoch ein grundsätzliches Verständnis für die zugrunde liegenden Mechanismen. Die vorliegende Doktorarbeit befasst sich mit photonengestützter Spektroskopie, die einen direkten Zugang zur elektronischen Struktur dieser Heterostruktursysteme ermöglicht. Ein weiteres Ziel ist es, geeignete spektroskopische Methoden zur Charakterisierung der vergrabenen Schichten zu etablieren.
Zwei prototypische oxidische Mehrschichtsysteme stehen im Zentrum der hier vorgestellten Untersuchungen. Das LaAlO3/SrTiO3-Heterostruktursystem weist ab einer kritischen LaAlO3-Filmdicke an der Grenzfläche ein zweidimensionales Elektronensystem mit hochmobilen Ladungsträgern auf. Als treibender Mechanismus wird die elektronische Rekonstruktion diskutiert. Im Rahmen dieser Arbeit wurde dieses zweidimensionale Elektronensystem mithilfe der Photoelektronenspektroskopie und der resonanten inelastischen Röntgenstreuung charakterisiert. Die daraus bestimmten Ladungsträgerdichten weisen im Vergleich mit Daten aus Transportmessungen auf eine Koexistenz von lokalisierten und mobilen Ladungsträgern an der Grenzfläche hin. Die Analyse von Rumpfniveau- und Valenzbandspektren zeigt, dass man zur Erklärung der experimentellen Resultate ein modifiziertes Bild der elektronischen Rekonstruktion benötigt, bei der Sauerstofffehlstellen an der LaAlO3-Oberfläche als Ladungsreservoir dienen könnten. Mithilfe der resonanten Photoelektronenspektroskopie war es möglich, die metallischen Zustände am chemischen Potential impulsaufgelöst zu spektroskopieren. So gelang es erstmals, die vergrabene Fermi-Fläche einer oxidischen Heterostruktur zu vermessen. Außerdem konnten Titan-artige Zustände identifiziert werden, die höchstwahrscheinlich durch Sauerstofffehlstellen im SrTiO3 lokalisiert sind. Diese werden als mögliche Quelle für den Ferromagnetismus interpretiert, der mit der supraleitenden Phase in der LaAlO3/SrTiO3-Heterostruktur koexistiert.
Bei dem anderen hier untersuchten Mehrschichtsystem handelt es sich um die LaNiO3-LaAlO3-Übergitterstruktur. Der Einbau des metallischen LaNiO3 in eine Heterostruktur ist aufgrund seiner Nähe zu einer korrelationsinduzierten isolierenden Phase hinsichtlich einer kontrollierten Ausbildung von neuartigen Phasen besonders interessant. In der Tat beobachtet man unterhalb einer LaNiO3-Schichtdicke von vier Einheitszellen einen kontinuierlichen Metall-Isolator-Übergang, der sich in den Valenzbandspektren durch einen Verlust an Quasiteilchenkohärenz äußert. Auch wenn die impulsaufgelösten
Daten am Fermi-Niveau durch Photoelektronenbeugung beeinflusst sind, so lässt sich dennoch eine Fermi-Fläche identifizieren. Ihre Topologie bietet die Möglichkeit eines Fermi-Flächen-Nestings mit der Ausbildung einer Spindichtewelle. Die Resultate unterstützen die Hinweise auf eine magnetische Ordnung im zweidimensionalen Grundzustand.
Graphene-based single-electron and hybrid devices, their lithography, and their transport properties
(2016)
This work explores three different aspects of graphene, a single-layer of carbon atoms arranged in a hexagonal lattice, with regards to its usage in future electronic devices; for instance in the context of quantum information processing. For a long time graphene was believed to be thermodynamically unstable. The discovery of this strictly two-dimensional material completed the family of carbon based structures, which had already been subject of intensive research with focus on zero-dimensional fullerenes and one-dimensional carbon nanotubes. Within only a few years of its discovery, the field of graphene related research has grown into one of today’s most diverse and prolific areas in condensed matter physics, highlighted by the award of the 2010 Nobel Prize in Physics to A.K. Geim and K. Noveselov for “their groundbreaking experiments regarding the two-dimensional material graphene”.
From the point of view of an experimental physicist interested in the electronic properties of a material system, the most intriguing characteristic of graphene is found in the Dirac-like nature of its charge carriers, a peculiar fact that distinguishes graphene from all other known standard semiconductors. The dynamics of charge carriers close to zero energy are described by a linear energy dispersion relation, as opposed to a parabolic one, which can be understood as a result of the underlying lattice symmetry causing them to behave like massless relativistic particles. This fundamentally different behavior can be expected to lead to the observation of completely new phenomena or the occurrence of deviations in well-known effects.
Following a brief introduction of the material system in chapter 2, we present our work studying the effect of induced superconductivity in mesoscopic graphene Josephson junctions by proximity to superconducting contacts in chapter 3. We explore the use of Nb as the superconducting material driven by the lack of high critical temperature and high critical magnetic field superconductor technology in graphene devices at that time. Characterization of sputter-deposited Nb films yield a critical transition temperature of \(T_{C}\sim 8{\rm \,mK}\). A prerequisite for successful device operation is a high interface quality between graphene and the superconductor. In this context we identify the use of an Ti as interfacial layer and incorporate its use by default in our lithography process. Overall we are able to increase the interface transparency to values as high as \(85\%\). With the prospect of interesting effects in the ballistic regime we try to enhance the electronic quality of our Josephson junction devices by substrate engineering, yet with limited success. We achieve moderate charge carrier mobilities of up to \(7000{\rm \,cm^2/Vs}\) on a graphene/Boron-nitride heterostructure (fabrication details are covered in chapter 5) putting the junction in the diffusive regime (\(L_{device}<L_{\rm{mfp}}\)). We speculate that either inhomogeneities in the graphene channel or lithography residues are responsible for this observation.
Furthermore we study the Josephson effect and Andreev reflection related physics in this device by low-temperature transport measurements. The junction carries a bipolar supercurrent which remains finite at the charge neutrality point. The genuine Josephson character is confirmed by the modulation of the supercurrent as a function of an out-of-plane magnetic field resembling that of a Fraunhofer-like pattern. This is further supported by the response of the junction to microwave radiation in the form of Shaprio steps. Surprisingly we find a strongly reduced superconducting energy gap of approximately \(\Delta = 400{\rm \,\mu eV}\) by quantitatively analyzing data of multiple Andreev reflections. We show this result to be consistent by careful analysis of the device parameters and comparison of these to a theoretical model. More experiments will be needed to determine the origin of this reduction and if the presence of the Ti interfacial layer plays an important role in that.
With regards to possible usability of superconducting contacts in more complex hybrid structures we can conclude that our work establishes the necessary preconditions while still leaving room for improvements; especially in terms of device quality.
In the second part of this work we are primarily interested in electrical transport properties of graphene nanodevices and their application in graphene-superconductor hybrid structures. The fact that graphene is mechanically stable down to a few tens of nanometers in width while exhibiting a finite conductance makes it an appealing choice as host for single-electron devices, also known as quantum dots. Our work on this topic is covered in chapter 4 where we first develop a high-resolution lithography process for the fabrication of single electron devices with critical feature sizes of roughly \(50{\rm \,nm}\). To this end we use a resist etch mask in combination with a reactive-ion etch process for device patterning. Carrier confinement in graphene is known to be hindered by the Klein tunneling phenomenon, a challenge that can be overcome by using all-graphene nano-constrictions to decouple the source and drain contacts from the central island.
The traditionally used constriction design is comprised of long and narrow connections. We argue that a design with very short and narrow constrictions could be beneficial for the quantum dot performance as the length merely affects the overall conductance and requires extended side-gates to control their transmission. We confirm the functionality of two different devices in low-temperature measurements, which differ in the size of their central island with \(d=250{\rm \,nm}\) for device no. 1 and \(d=400{\rm \,nm}\) for device no. 2. Coulomb blockade measurements conducted at \(20{\rm \,mK}\) on both devices reveal clear sequences of Coulomb peaks with amplitudes of up to \(0.8\rm{\,e}^2/\rm{h}\), a value significantly larger than what is commonly reported for similar devices. We interpret this as an indication of rather homogeneous constrictions, resulting from the modified design. Coulomb diamond measurements display the behavior expected for a lithographically designed single quantum dot revealing no features related to the presence of an additional dot. Using the stability diagram we determine the addition energies of the two dots and find them to be in good agreement with values reported in the literature for devices of similar size. Using the normalized Coulomb peak spacing as a figure of merit for the device quality we find that device no. 1 quantitatively compares well with a similar device fabricated on a superior hexagonal boron-nitride substrate. This result underlines the importance of non-substrate related extrinsic disorder sources and emphasizes the cleanliness of our lithography process.
Superconductor-graphene quantum dot hybrid structures employing Nb and Al electrodes were successfully fabricated from a lithography point of view, yet no evidence of any superconducting related effect was found in transport measurements. We assign the missing observation to interface issues that require careful analysis and likely a revision of the fabrication process.
A property equally important in graphene Josephson Junctions and quantum dots is the electronic quality of the device, as has been addressed in the previous paragraphs. It turns out that the \(\rm{SiO}_{2}\;\) substrate and lithography residues constitute the two major sources of disorder in graphene. In chapter 5 we present an approach based on the original work of Dean et al. who utilize hexagonal-Boron nitride as a replacement substrate for \(\rm{SiO}_{2}\). This idea was then extended by Wang et al. who also used this material as a shield to protect the graphene surface from contaminations during the lithography process. These structures are commonly referred to as van der Waals heterostructures and are assembled by stacking individual crystals on top of each other.
For this purpose we build a mechanical transfer system based on an optical microscope equipped with an additional micro-manipulator stage allowing precise alignment of two micrometer sized crystals with high precision. We demonstrate the functionality of this setup on the basis of successfully fabricated heterostructures. Furthermore a variation on the traditional method for single graphene/boron nitride structures is presented. Based on a reversed stacking order this method yields large areas of homogeneous graphene, however it comes with the drawback of limited yields. A common type of problem accompanying the fabrication of encapsulated graphene structures is the formation of contamination spots (also referred to as bubbles in the literature) at the interfaces between BN and graphene. We experience similar issues which we are unable to prevent and thus pose a limit to the maximum available device size. In the next step we develop a full lithography paradigm including high-resolution device patterning by electron beam lithography combined with reactive ion etching and two different ways to establish electrical contact to the encapsulated graphene flake. In this context we explore the use of three different types of etch masks and find a double layer of PMMA/HSQ best suited for our purposes. Our low power plasma etch process utilizes a combination of \(\rm{O}_{2}\;\) and \(\rm{CHF}_{3}\;\) and is optimized to show reproducible etch results.
A widely used method for electrical contacts relies on one-dimensional edge contacts whose functionality crucially depends on the use of Cr as the interface layer. For compatibility reasons with superconducting materials, e.g. Nb, we develop a self-aligned contact process that instead of only Cr is also compatible with Ti. We achieve this by modifying the plasma etch parameters such that the etch process exhibits extremely low graphene etch rates while keeping a high etch rate for h-BN. This allows clearing of a narrow stripe of graphene at the edge of the structure by using a thick PMMA layer as etch mask as replacement of the PMMA/HSQ combination. The purpose of this PMMA mask is two-fold since it also serves as lift-off mask during metalization.
The quality of the edge contacts fabricated with either method is excellent as determined from transport measurements at room and cryogenic temperatures. With typical contact resistances of a few hundred \({\rm \,}\Omega\mu{\rm m}\) and a record low of \(100{\rm \,}\Omega\mu{\rm m}\) the contacts can be considered to be state-of-the-art. The positive effect of encapsulation on the electronic quality is confirmed on a device exhibiting charge carrier mobilities exceeding \(10^5{\rm \,cm^2/Vs}\), one magnitude larger than what is commonly achieved on \(\rm{SiO}_{2}\).
The investigation of induced superconductivity in graphene Josephson Junctions, quantum dots, and high mobility heterostructures underlines the versatility of this material system, while covering only a tiny fraction of its prospects. Combination of the acquired knowledge regarding the physical effects and the developed lithography processes lay the foundation towards the fabrication and study of novel graphene hybrid devices.
Due to their complex chemical structure transition metal oxides display many fascinating properties which conventional semiconductors lack.
For this reason transition metal oxides hold a lot of promise for novel electronic functionalities.
Just as in conventional semiconductor heterostructures, the interfaces between different materials play a key role in oxide electronics.
The textbook example is the (001) interface between the band insulators LaAlO\(_3\) and SrTiO\(_3\) at which a two-dimensional electron system (2DES) forms.
In order to utilize such a 2DES in prospective electronic devices, it is vital that the electronic properties of the interface can be controlled and manipulated at will.
Employing photoelectron spectroscopy as well as electronic transport measurements, this thesis examines how such interface engineering can be realized in the case of the LaAlO\(_3\)/SrTiO\(_3\) heterostructure:
By photoemission we manage to unambiguously distinguish the different mechanisms by which SrTiO\(_3\) can be doped with electrons.
An electronic reconstruction is identified as the driving mechanism to render stoichiometric LaAlO\(_3\)/SrTiO\(_3\) interfaces metallic.
The doping of the LaAlO\(_3\)/SrTiO\(_3\) heterointerface can furthermore be finely adjusted by changing the oxygen vacancy \(V_{\mathrm{O}}\) concentration in the heterostructure.
Combining intense x-ray irradiation with oxygen dosing, we even achieve control over the \(V_{\mathrm{O}}\) concentration and, consequently, the doping in the photoemission experiment itself.
Exploiting this method, we investigate how the band diagram of SrTiO\(_3\)-based heterostructures changes as a function of the \(V_{\mathrm{O}}\) concentration and temperature by hard x-ray photoemission spectroscopy.
With the band bending in the SrTiO\(_3\) substrate changing as a function of the \(V_{\mathrm{O}}\) concentration, the interfacial band alignment is found to vary as well.
The relative permittivity of the SrTiO\(_3\) substrate and, in particular, its dependence on temperature and electric field is identified as one of the essential parameters determining the electronic interface properties.
That is also why the sample temperature affects the charge carrier distribution.
The mobile charge carriers are shown to shift toward the SrTiO\(_3\) bulk when the sample temperature is lowered.
This effect is, however, only pronounced if the total charge carrier concentration is small.
At high charge carrier concentrations the charge carriers are always confined to the interface, independent of the sample temperature.
The dependence of the electronic interface properties on the \(V_{\mathrm{O}}\) concentration is also investigated by a complementary method, viz. by electronic transport measurements.
These experiments confirm that the mobile charge carrier concentration increases concomitantly to the \(V_{\mathrm{O}}\) concentration.
The mobility of the charge carriers changes as well depending on the \(V_{\mathrm{O}}\) concentration.
Comparing spectroscopy and transport results, we are able to draw conclusions about the processes limiting the mobility in electronic transport.
We furthermore build a memristor device from our LaAlO\(_3\)/SrTiO\(_3\) heterostructures and demonstrate how interface engineering is used in practice in such novel electronic applications.
This thesis furthermore investigates how the electronic structure of the 2DES is affected by the interface topology:
We show that, akin to the (001) LaAlO\(_3\)/SrTiO\(_3\) heterointerface, an electronic reconstruction also renders the (111) interface between LaAlO\(_3\) and SrTiO\(_3\) metallic.
The change in interface topology becomes evident in the Fermi surface of the buried 2DES which is probed by soft x-ray photoemission.
Based on the asymmetry in the Fermi surface, we estimate the extension of the conductive layer in the (111)-oriented LaAlO\(_3\)/SrTiO\(_3\) heterostructure.
The spectral function measured furthermore identifies the charge carriers at the interface as large polarons.