Improved conductivity-measurement of semiconductor epitaxial layers by means of the contactless microwave method

Please always quote using this URN: urn:nbn:de:bvb:20-opus-37763
  • Measurements and calculations of the scattering-characteristics of stratified lossy dielectric blocks completely filling a waveguide cross section are presented. The method is used for contactless conductivity measurements of MBE-grown II-VI semiconductor layers.

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Author: P. Boege, H. Schäfer, Xu Shanjia, Wu Xinzhang, S. Einfeldt, Charles R. Becker, D. Hommel, R. Geick
Document Type:Conference Proceeding
Faculties:Fakultät für Physik und Astronomie / Physikalisches Institut
Year of Completion:1994
Source:In: Millimeter and Submillimeter Waves and Applications : proceedings of the International Conference on Millimeter and Submillimeter Waves and Applications, 10 - 14 January 1994, San Diego, California / Mohammed N. Afsar. - Bellingham u.a. : SPIE, 1994. - ISBN: 0-8194-1515-4. - (SPIE:2211) 649-658
Dewey Decimal Classification:5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik
GND Keyword:Millimeterwelle; Kongreß; San Diego <Calif.; 1994>
Release Date:2009/09/22